C-V Testing for
Components and
Semiconductor Devices
APPLICATIONS GUIDE
C-V Testing for Components and Semiconductor Devices
Capacitance-Voltage (C-V) testing is widely used to determine a variety of semiconductor
parameters, such as doping concentration and profiles, carrier lifetime, oxide thickness, interface
trap density, and more. This C-V testing applications guide features a collection of application notes
focused on C-V testing methods and techniques using the 4200A-SCS Parameter Analyzer. The
4200A-SCS provides three C-V methods: Multi-frequency C-V (1 kHz - 10 MHz), Very Low Frequency
C-V (10 mHz - 10 Hz,) and Quasi-static C-V measurements.
Contents
1
C-V Testing for Components and Semiconductor Devices
4
Making Optimal Capacitance and AC Impedance